Resonant Cavity Enhanced

Resonant Cavity Enhanced (RCE) photodiodes are promising candidates for applications in optical communications and interconnects where ultrafast high-eeciency detection is desirable. We have designed and fabricated RCE Schottky photodiodes in the (Al,In)GaAs material system for 900nm wavelength. The observed temporal response with 10 ps pulse width was limited by the measurement setup and a conservative estimation of the bandwidth corresponds to more than 100 GHz. A direct comparison of RCE versus conventional detector performance was performed by high speed measurements under optical excitation at resonant wavelength (895 nm) and at 840 nm where the device functions as a single pass conventional photodiode. A more than twofold bandwidth enhancement with the RCE detection scheme was demonstrated.